รายละเอียดวารสารวิชาการ

  1. หน้าแรก
  2. รายชื่อนักวิจัย
  3. ฉัตรชัย พะวงษ์
  4. ข้อมูลวารสารวิชาการ

ชื่องานวิจัย ( Article Name)

Utilization of the cyclic interferometer in polarization phase-shifting technique to determine the thickness of transparent thin-films

บทคัดย่อ ( Abstract )

An alternative polarization phase-shifting technique is proposed to determine the thickness of transparent thin-films. In this study, the cyclic interferometric configuration is chosen to maintain the stability of the operation against external vibrations. The incident light is simply split by a non-polarizing beam splitter cube to generate test and reference beams, which are subsequently polarized by a polarizing beam splitter. Both linearly polarized beams are orthogonal and counter -propagating within the interferometer. A wave plate is inserted into the common paths to introduce an intrinsic phase difference between the orthogonal polarized beams. A transparent thin-film sample, placed in one of the beam tracks, modifies the output signal in terms of the phase retardation in comparison with the reference beam. The proposed phase-shifting technique uses a moving mirror with a set of “fixed” polarizing elements, namely, a quarter-wave retarder and a polarizer, to facilitate phase extraction without rotating any polarizing devices. The measured thicknesses are compared with the measurements of the same films acquired using standard equipment such as the field-emission scanning electron microscope and spectroscopic ellipsometer. Experimental results with the corresponding measured values are in good agreement with commercial measurements. The system can be reliably utilized for non-destructive thickness measurements of transparent thin -films.

เอกสารวิจัย ( Paper )

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ผู้เขียน ( Authors )

  • ฉัตรชัย พะวงษ์

ข้อมูลการเผยแพร่ ( Journal Infomation )