รายละเอียดวารสารวิชาการ

  1. หน้าแรก
  2. รายชื่อนักวิจัย
  3. ฉัตรชัย พะวงษ์
  4. ข้อมูลวารสารวิชาการ

ชื่องานวิจัย ( Article Name)

Investigation the use of rotating linearly polarized light for characterizing SiO2 thin-film on Si substrate

บทคัดย่อ ( Abstract )

This research is based on the Fresnel’s equations and the ellipsometric technique that investigate the sample of SiO2 thinfilm on Si substrate. The investigation is made by a probing beam which is in the form of a rotating linearly polarized light generated by the polarizing Mach-Zehnder interferometer (pMZi). The detection of the changed polarization states of the incident light due to reflection on the sample surfaces led to a set of unique characteristics describing a thin-film substrate system in terms of ellipsometric parameters ψ and Δ. SiO2 thin-films were chosen to study because of their well known characteristics. The accuracy of measurements was confirmed by comparisons to calculated values derived from Fresnel’s equations and a standard instrument. The results clearly reveal a feasibility of using the rotating linearly polarized light produced by pMZi for a non-destructive characterization of the thin-film system.

เอกสารวิจัย ( Paper )

VIEW

ผู้เขียน ( Authors )

  • ฉัตรชัย พะวงษ์

ข้อมูลการเผยแพร่ ( Journal Infomation )